VSM has achieved to control 1 nm resolution at 500 mm/sec. And it is able to automatically switch high speed and low speed with using our own control system. It is available for high vacuum use without generating large magnetic field. The magnetic field level from VSM is less than 10nT. VSM adopts a hard type piezoelectric material which generates less heat so that a continuous drive becomes possible. In addition, VSM is very stable to keep a position. Therefore any brake systems are not required.

This table has a ceramic rotation guide and an ultrasonic motor in order to provide a non magnetic system. Our ultrasonic motor, VSM, originally developed by ourselves is able to obtain a high speed & high resolution positioning. There is an Electrostatic Chuck made of Zero Expansion Stiffness Ceramics naming ZPF on top of the table. This ? table achieved ultra high resolution positioning system and it is available for silicon wafer inspection equipment using an electron beam in a high vacuum condition.

Piezoelectric actuator takes on its characteristic with stacking direction of Multilayer Ceramics. It has a good quality for completely sealing in metal casing and suitable with Micro Positioning System or Mass Flow Controller Devices. By using the same technology, we can also provide Multilayer Benders or Multilayer Bimorph Actuators.

Vibration of Piezoelectric Disk makes sounds. You can choose Piezo Buzzer, Piezo Sounder, Piezo Speaker, Piezo Receiver etc. according to your equipment. We can provide a low profile SMD Piezo Sounder with a suitable quality for Pb-free soldering process.

We can design a Piezo Inverter or a DC-DC Piezo Converter and draw a performance of Multilayer Piezoelectric Transformers, according to your request. It is suitable for a notebook computer or a high voltage DC power supply. Piezoelectric Transformers aren't affected by any magnetic fields, which must be a good reason for choosing this technology.

Piezo Positioner can provide a Nano Positioning System that has been used for Hard Disk inspection equipment or Photolithography machine.